Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etch process with rotatable shower head

Etch process with rotatable shower head

US Patent 11227747 · Granted Jan 18, 2022

Estimated economic value: $20,216,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wireless methods, devices and systems for rapid synchronization with periodic br2025
Source and drain structure with reduced contact resistance and enhanced mobility2025
Method for forming recesses in a substrate by etching dummy fins2025
Contact structure for semiconductor device2025
Metal gates of transistors having reduced resistivity2025
Interlayer dielectric layer2025
Semiconductor device and method of manufacture2025
Semiconductor device and method of manufacture2025
Semiconductor device and method2025
Method of forming a barrier layer in an interconnect structure of semiconductor 2025
Method of forming a barrier layer in an interconnect structure of semiconductor 2025
Gas sensor2025