Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Scanning ion beam etch

Scanning ion beam etch

US Patent 11227741 · Granted Jan 18, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrostatic discharge prevention in ion beam system2025
Scanning ion beam deposition and etch2024
Scanning ion beam deposition and etch2024
Ion beam deposition target life enhancement2024
Ion beam deposition target life enhancement2024
Integral sweep in ion beam system2023
Scanning ion beam etch2023
Scanning ion beam etch2023
Wafer stage for symmetric wafer processing2018
Wafer stage for symmetric wafer processing2018
Powered anode for ion source for DLC and reactive processes2018
Powered anode for ion source for DLC and reactive processes2018