Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Six degree of freedom workpiece stage

Six degree of freedom workpiece stage

US Patent 11209373 · Granted Dec 28, 2021

Estimated economic value: $257,755,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-stage, multi-zone substrate positioning systems2023
Slotted electrostatic chuck2021
Methods and systems for chucking a warped wafer2019
Floating wafer chuck2018
Stage apparatus for semiconductor inspection and lithography systems2016
Dual scanning stage2014
Active planar autofocus2014
Dual scanning stage2012
Non contact substrate chuck2011