Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Layered heater system having conductive overlays

Layered heater system having conductive overlays

US Patent 11191129 · Granted Nov 30, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for providing variable ramp-down control for an electric heate2025
Method and system for providing variable ramp-up control for an electric heater2025
Thermal diffuser for a semiconductor wafer holder2024
Thermal diffuser for a semiconductor wafer holder2024
Multi-zone pedestal heater without vias2024
Electrostatic puck and method of manufacture2024
Thermal system with a temperature limiting device2024
High dynamic temperature control system2024
High dynamic temperature control system2024
Multi-zone pedestal heater having a routing layer2024
Integrated heater and method of manufacture2023
Thermal diffuser for a semiconductor wafer holder2022