Foundation substrate for producing diamond film and method for producing diamond substrate using same

Assignee

• Shin-Etsu Chemical Co.
• National University
• Kanazawa University

Inventors

• Hitoshi Noguchi (98 patents)
• Toshiharu Makino (26 patents)
• Masahiko Ogura (44 patents)
• Hiromitsu Kato (26 patents)
• Hiroyuki Kawashima (46 patents)
• Satoshi Yamasaki (93 patents)
• Norio Tokuda (10 patents)

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