Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity

Assignee

• Freiberger Compound Materials Gmbh

Inventors

• Wolfram Fliegel (3 patents)
• Christoph Klement (3 patents)
• Christa Willnauer (3 patents)
• Max Scheffer-Czygan (5 patents)
• André Kleinwechter (6 patents)
• Stefan Eichler (18 patents)
• Berndt Weinert (12 patents)
• Michael Mäder (3 patents)

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