Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beam blanking device for a multi-beamlet charged particle beam apparatus

Beam blanking device for a multi-beamlet charged particle beam apparatus

US Patent 11120965 · Granted Sep 14, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for inspecting a specimen and charged particle beam device2025
Charged particle beam manipulation device and method for manipulating charged pa2023
Method of influencing a charged particle beam, multipole device, and charged par2022
Charged particle beam apparatus, multi-beamlet assembly, and method of inspectin2022
Charged particle beam device and method of operating a charged particle beam dev2021
Charged particle beam device, field curvature corrector, and methods of operatin2020
Device and method for operating a charged particle device with multiple beamlets2020
Charged particle beam device, multi-beam blanker for a charged particle beam dev2020
Charged particle beam device, multi-beam blanker for a charged particle beam dev2019
Electrostatic multipole device, electrostatic multipole arrangement, and method 2017
System for imaging a signal charged particle beam, method for imaging a signal c2017
Charged particle beam device, system for a charged particle beam device, and met2017