Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus

Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus

US Patent 11114298 · Granted Sep 7, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for securely updating binary data in vehicle2023
Autonomous driving apparatus and method2023
Autonomous driving apparatus and method that outputs different warnings based on2023
Light generator including debris shielding assembly, photolithographic apparatus2023
Apparatus and method for displaying rear image of vehicle2023
Autonomous driving apparatus and method2022
Autonomous driving apparatus and method2022
EUV mask inspection apparatus and method, and EUV mask manufacturing method incl2021
EUV generation device2020
Wafer inspection apparatus and wafer inspection method using the same2020
Apparatus for inspecting material property of plurality of measurement objects2019
Method of inspecting surface having a minute pattern based on detecting light re2019