Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic method and apparatus

Lithographic method and apparatus

US Patent 11106144 · Granted Aug 31, 2021

Estimated economic value: $96,013,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Two-dimensional diffraction grating2024
Imaging via zeroth order suppression2024
Determining subset of components of an optical characteristic of patterning appa2023
Tuning patterning apparatus based on optical characteristic2022
Tuning patterning apparatus based on optical characteristic2022
Radiation system2022
Lithographic apparatus and method2021
Optical system and method2020
Lithographic method and apparatus2020
Lithographic apparatus and device manufacturing method2020
Patterning device2020
Lithographic apparatus and device manufacturing method2020