Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for producing a reflective optical element and reflective optical element

Method for producing a reflective optical element and reflective optical element

US Patent 11073765 · Granted Jul 27, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical element for a EUV projection exposure system2025
Reflective optical element2021
Intensity adaptation filter for EUV microlithography, method for producing same,2020
Mirror element, in particular for a microlithographic projection exposure appara2020
Projection optical unit for EUV projection lithography2020
Optical system, in particular for a microlithographic projection exposure appara2019
Method for producing a mirror element2019
Mirror, in particular for a microlithographic projection exposure apparatus2019
Reflecting coating with optimized thickness2018
Mirror, in particular for a microlithographic projection exposure apparatus2018
Reflective optical element, and optical system of a microlithographic projection2018
Microlithography illumination system and microlithography illumination optical u2017