Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shutter disk for physical vapor deposition chamber

Shutter disk for physical vapor deposition chamber

US Patent 11049761 · Granted Jun 29, 2021

Estimated economic value: $47,858,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of assembling drift tube assemblies in ion implantors2025
Volume filling cassette for load lock2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Robot for simultaneous substrate transfer2024
High-density substrate processing systems and methods2024
Robot for simultaneous substrate transfer2024
Liquid electrolyte for lithium metal battery2024
Electrochemical cell design with lithium metal anode2023
Coaxial lift device with dynamic leveling2023
Robot for simultaneous substrate transfer2023
High-density substrate processing systems and methods2023