Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate transport robot, substrate transport system, and substrate transport method

Substrate transport robot, substrate transport system, and substrate transport method

US Patent 11031269 · Granted Jun 8, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Horizontal articulated robot and substrate transfer system comprising same2025
Robot, and substrate transportation system comprising the same2025
Dispensing apparatus and dispensing method2022
Dispensing robot, method of controlling dispensing robot, and dispensing method2022
Method of teaching robot2021
Lid closing device and lid closing method2021
Method of attaching tip to pipette2021
Robot and working method by the robot2021
Liquid surface detecting apparatus and liquid surface detecting method using ref2021
End effector, robot and robot system2021
Actuator2021
Robot system and control method of robot system2021