Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same

Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same

US Patent 10971335 · Granted Apr 6, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus2025
Method and apparatus for processing biometric information in electronic device2025
Mutually induced filters2024
Apparatuses and methods for avoiding electrical breakdown from RF terminal to ad2023
Multi-air conditioner for heating and cooling operations2023
Air conditioning apparatus2022
Display apparatus and control method for display of a virtual flat screen2022
Electronic device including antenna2022
Apparatuses and methods for avoiding electrical breakdown from RF terminal to ad2022
Mutually induced filters2022
Electronic circuit for filtering signal received from plasma chamber2022
Electronic circuit for filtering signal received from plasma chamber2022