Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sub-resolution defect detection

Sub-resolution defect detection

US Patent 10935501 · Granted Mar 2, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-layer calibration for empirical overlay measurement2025
Electric power assisted steering2023
Voltage regulator with adaptive feed-forward compensation for periodic loads2023
Sample surface polarization modification in interferometric defect inspection2021
Sample inspection using topography2021
Interferometer with pixelated phase shift mask2020
Electromechanical actuator2020
Electromechanical actuator2020
Scanning white-light interferometry system for characterization of patterned sem2019
Programmable level shifter for LCD systems2019
Image based overlay measurement with finite gratings2018
Programmable level shifter for LCD systems2017