Methods of forming micropatterns and substrate processing apparatus

Assignee

• Samsung

Inventors

• Sang Shin Jang (10 patents)
• Jong-Min Baek (50 patents)
• Hoon Seok Seo (13 patents)
• Eui Bok Lee (17 patents)
• Sung-Jin Kang (26 patents)
• VietHa Nguyen (8 patents)
• Deok-Young Jung (28 patents)
• Sang-Hoon Ahn (83 patents)
• Hyeok-Sang Oh (17 patents)
• Woo Kyung You (22 patents)

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