Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure

Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure

US Patent 10914938 · Granted Feb 9, 2021

Estimated economic value: $41,291,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Biaxial microelectromechanical mirror device with piezoelectric actuation2025
Microelectromechanical mirror device with piezoelectric actuation having improve2025
Microelectromechanical mirror device with compensation of planarity errors2025
Microelectromechanical mirror device with piezoelectric actuation and improved o2025
Microelectromechanical mirror device with piezoelectric actuation and piezoresis2025
Microelectromechanical device having a structure tiltable by piezoelectric actua2025
MEMS actuator for in-plane movement of a mobile mass and optical module comprisi2025
Compact line scan MEMS time of flight system with actuated lens2024
MEMS micromirror device enveloped in a package having a transparent surface and 2024
MEMS device having an improved stress distribution and manufacturing process the2024
Hermetically sealed MEMS mirror and method of manufacture2024
Hermetically sealed MEMS mirror and method of manufacture2024