Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same

Assignee

• Dnf Co.

Inventors

• Sung-Gi Kim (76 patents)
• Se Jin JANG (25 patents)
• Byeong-il YANG (14 patents)
• Joong Jin PARK (9 patents)
• Sang-Do Lee (41 patents)
• Jeong Joo PARK (20 patents)
• Sam Dong LEE (7 patents)
• Gun Joo PARK (4 patents)
• Sang Ick Lee (49 patents)
• Myong Woon Kim (27 patents)

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