Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Yi-Chun Lu (23 patents)
- Changyong Xiao (21 patents)
- Yihui Lin (5 patents)
- Qin Zhang (140 patents)
- Hua Wang (2 patents)
- Xiang Hu (59 patents)
- Xiaona Zhu (2 patents)
- Ying Jiang (46 patents)