Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs

Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs

US Patent 10818527 · Granted Oct 27, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for determining optimal number of submodules for use in semiconductor man2025
Plating method and plating apparatus2025
Semiconductor manufacturing apparatus, failure prediction method for semiconduct2025
Apparatus for plating and method of plating2024
Method of constructing prediction model that predicts number of plateable substr2022
Semiconductor manufacturing apparatus, failure prediction method for semiconduct2022
Plating method and plating apparatus2022
Plating system, a plating system control method, and a storage medium containing2021
Scheduler, substrate processing apparatus, and substrate conveyance method2021
Scheduler, substrate processing apparatus, and substrate conveyance method2020
Scheduler, substrate processing apparatus, and substrate conveyance method2020
Plating method and plating apparatus2020