Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber

Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber

US Patent 10811289 · Granted Oct 20, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing device2022
Substrate transfer device and substrate transfer method2020
Connecting mechanism and connecting method of substrate container2018
Gate valve and substrate processing system2017
Continuous sterilization system2014
Film forming apparatus and vaporizer2014
Exhaust trap device2011
Exhaust trap device2009