Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for removing a metal deposit arranged on a surface in a chamber

Method for removing a metal deposit arranged on a surface in a chamber

US Patent 10767257 · Granted Sep 8, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for depositing an insulating material into a via2021
Method for depositing an insulating material into a via2021
Method for producing an interconnection comprising a via extending through a sub2021
Method for producing an interconnection comprising a via extending through a sub2021
Method for removing a metal deposit placed on a surface in a chamber2019
Method for removing a metal deposit placed on a surface in a chamber2019
Chemical vapor deposition device2017