Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inject insert for EPI chamber

Inject insert for EPI chamber

US Patent 10760161 · Granted Sep 1, 2020

Estimated economic value: $30,946,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Air shrouds with integrated heat exchanger2025
Fast switching gas circuits and processing chambers, and related methods and app2025
Extreme uniformity heated substrate support assembly2025
Methods of correlating zones of processing chambers, and related systems and met2025
Methods for detection using optical emission spectroscopy2025
Flow guide structures and heat shield structures, and related methods, for depos2025
Lift assemblies, and related methods and components, for substrate processing ch2025
Epitaxial deposition chamber2025
Spot heating by moving a beam with horizontal rotary motion2025
Temperature profile measurement and synchronized control on substrate and suscep2025
Multi-layer EPI chamber body2025
Multi zone spot heating in EPI2024