Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing semiconductor device and semiconductor manufacturing apparatus

Method of manufacturing semiconductor device and semiconductor manufacturing apparatus

US Patent 10727278 · Granted Jul 28, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor manufacturing apparatus and method for manufacturing semiconductor2024
Etching method, semiconductor manufacturing apparatus, and method of manufacturi2023
Pattern forming method and method of manufacturing semiconductor device2021
Method of manufacturing 3-dimensional memories including high aspect ratio memor2019
Plasma processing apparatus and plasma processing method2019
Method for manufacturing semiconductor device2018
Semiconductor device and method for manufacturing same2018
Semiconductor memory device and method for manufacturing same2016
Manufacturing method of semiconductor device2016
Semiconductor device manufacturing method2016
Pattern formation method2015
Method of manufacturing a semiconductor device2015