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Home › Method of inspecting back surface of epitaxial wafer, epitaxial wafer back surface inspection apparatus, method of managing lift pin of epitaxial growth apparatus, and method of producing epitaxial wafer

Method of inspecting back surface of epitaxial wafer, epitaxial wafer back surface inspection apparatus, method of managing lift pin of epitaxial growth apparatus, and method of producing epitaxial wafer

US Patent 10718722 · Granted Jul 21, 2020

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