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Home › Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate

Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate

US Patent 10670961 · Granted Jun 2, 2020

Estimated economic value: $25,000 ⓘ

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