Active mechanical-environmental-thermal MEMS device for nanoscale characterization

Assignee

• National Technology & Engineering Solutions Of Sandia

Inventors

• Katherine L. Jungjohann (3 patents)
• William Mook (3 patents)
• Claire Chisholm (1 patents)
• Michael Shaw (1 patents)
• Khalid Mikhiel Hattar (8 patents)
• Paul C. Galambos (39 patents)
• Andrew Jay Leenheer (5 patents)
• Sean J. Hearne (5 patents)

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