Method of chemical doping that uses CMOS-compatible processes

Assignee

• National Technology & Engineering Solutions Of Sandia

Inventors

• Shashank Misra (9 patents)
• Daniel Robert Ward (6 patents)
• DeAnna Marie Campbell (4 patents)
• Tzu-Ming Lu (4 patents)
• Scott W. Schmucker (4 patents)
• Evan Michael Anderson (4 patents)
• Andrew Jay Leenheer (5 patents)
• Jeffrey Andrew Ivie (1 patents)

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