Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › X-ray fluorescence apparatus for contamination monitoring

X-ray fluorescence apparatus for contamination monitoring

US Patent 10634628 · Granted Apr 28, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Navigation accuracy using camera coupled with detector assembly2025
Small-angle X-ray scatterometry2024
Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt2023
Small-angle x-ray scatterometry2023
Small-angle x-ray scatterometry2021
X-ray source optics for small-angle X-ray scatterometry2021
Wafer alignment for small-angle x-ray scatterometry2021
X-ray detection optics for small-angle X-ray scatterometry2021
Image contrast in X-ray topography imaging for defect inspection2020
Closed-loop control of X-ray knife edge2019
Closed-loop control of X-ray knife edge2019
Measurement of small features using XRF2017