Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for detecting coordinates, coordinate output device and defect inspection device

Method for detecting coordinates, coordinate output device and defect inspection device

US Patent 10586322 · Granted Mar 10, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Inspection method and inspection apparatus2024
Substrate production method, substrate processing apparatus, and substrate produ2019
Inspection device, inspection method, and image processing program2018
Inspection apparatus2017
Inspection apparatus2016
Mask inspection apparatus and mask inspection method2014