Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Internal chamber rotation motor, alternative rotation

Internal chamber rotation motor, alternative rotation

US Patent 10517146 · Granted Dec 24, 2019

Estimated economic value: $58,132,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Alignment module with a cleaning chamber2023
System and method for aligning a mask with a substrate2022
Contactless latch and coupling for vacuum wafer transfer cassette2022
Processing system for forming layers2022
Substrate carrier having hard mask2021
Hot wall reactor with cooled vacuum containment2017
Apparatus for variable substrate temperature control2017
Internal chamber rotation motor, alternative rotation2016
Methods and apparatus for thermal based substrate processing with variable tempe2014
Semiconductor wafer support lift-pin assembly2005
Multiple sided robot blade for semiconductor processing equipment2003
Semiconductor wafer support lift-pin assembly2003