Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lift pin holder with spring retention for substrate processing systems

Lift pin holder with spring retention for substrate processing systems

US Patent 10460977 · Granted Oct 29, 2019

Estimated economic value: $61,208,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer lift pin mechanism for preventing local backside deposition2025
Plasma viewport2025
Multilayer coatings of component parts for a work piece processing chamber2025
Ex situ coating of chamber components for semiconductor processing2025
Vapor accumulator for corrosive gases with purging2025
Pedestal thermal profile tuning using multiple heated zones and thermal voids2025
Pedestal for a substrate processing system2025
Pedestal polishing apparatus2024
Ex situ coating of chamber components for semiconductor processing2024
Preventing deposition on pedestal in semiconductor substrate processing2023
Ex situ coating of chamber components for semiconductor processing2022
In-situ chamber clean end point detection systems and methods using computer vis2021