Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Template, imprint device, and manufacturing method of semiconductor device

Template, imprint device, and manufacturing method of semiconductor device

US Patent 10423066 · Granted Sep 24, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Memory device2024
Photomask and manufacturing method of semiconductor device2019
Pattern formation method, imprint device, and computer-readable non-volatile sto2019
Film formation method, film formation apparatus and storage medium2014
Dry cleaning method of substrate processing apparatus2013