Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for pellicle removal

Method and apparatus for pellicle removal

US Patent 10409154 · Granted Sep 10, 2019

Estimated economic value: $21,263,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for contamination identification2022
Method and apparatus for pellicle removal2018
Method and apparatus for pellicle removal2018
Method and apparatus for pellicle removal2018
Films for prevention of crystal growth on fused silica substrates for semiconduc2009
Method for playing a table tennis game and playing table2007
Method and apparatus for testing circuits having different configurations with a2001
Methods for repair of photomasks2001
Methods for repair of photomasks2000
Method for repair of photomasks2000
Automatic probe replacement in a scanning probe microscope2000
Methods for repair of photomasks2000