Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Scanning mirror device and a method for manufacturing it

Scanning mirror device and a method for manufacturing it

US Patent 10377625 · Granted Aug 13, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fluid vaporizers2025
Method for bonding wafers, and a wafer2025
MEMS structure including a cap with a via2024
Two-axis MEMS mirror with separated drives2022
MEMS reflector with center support2021
MEMS reflector system2021
Scanning reflector system2021
Scanning MEMS reflector system2019
Manufacturing method of a multi-level micromechanical structure on a single laye2018
Multi-level micromechanical structure2017
Method of manufacturing a MEMS structure and use of the method2017
Method of manufacturing a MEMS structure2016