Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for polishing a surface of a substrate

Apparatus and method for polishing a surface of a substrate

US Patent 10376929 · Granted Aug 13, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing control system, substrate processing control method, and pr2024
Substrate cleaning method and substrate cleaning apparatus2024
Polishing apparatus2024
Top ring for holding a substrate and substrate processing apparatus2023
Polishing method and polishing apparatus2023
Polishing apparatus and polishing method2022
Polishing head and polishing apparatus2022
Chemical mechanical polishing apparatus for polishing workpiece2022
Substrate processing apparatus and storage medium having program stored therein2022
Substrate processing apparatus and storage medium having program stored therein2022
Substrate polishing device and polishing method2022
Substrate processing apparatus and substrate processing method2021