Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Insulator structure for avoiding abnormal electrical discharge and plasma concentration

Insulator structure for avoiding abnormal electrical discharge and plasma concentration

US Patent 10354844 · Granted Jul 16, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scintillator array, method for manufacturing scintillator array, radiation detec2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus2025
Plasma processing apparatus and lid member2025
Electrostatic chuck device2025
Wafer support device2024
Plasma processing apparatus and plasma processing method2024
Shower plate, plasma processing apparatus and plasma processing method2024
Plasma processing apparatus and plasma processing method2024
Plasma processing apparatus and lower stage2024