Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target expansion rate control in an extreme ultraviolet light source

Target expansion rate control in an extreme ultraviolet light source

US Patent 10314153 · Granted Jun 4, 2019

Estimated economic value: $9,327,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser system for source material conditioning in an EUV light source2025
EUV light source target metrology2025
Calibration system for an extreme ultraviolet light source2024
System for monitoring a plasma2024
Laser system for target metrology and alteration in an EUV light source2024
Determining moving properties of a target in an extreme ultraviolet light source2023
System for monitoring a plasma2022
Target expansion rate control in an extreme ultraviolet light source2021
Target expansion rate control in an extreme ultraviolet light source2021
Reducing the effect of plasma on an object in an extreme ultraviolet light sourc2021
Target expansion rate control in an extreme ultraviolet light source2020
Target expansion rate control in an extreme ultraviolet light source2020