Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Droplet dispensing device, method for providing droplets, and light source for providing UV or X-ray light

Droplet dispensing device, method for providing droplets, and light source for providing UV or X-ray light

US Patent 10306742 · Granted May 28, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Nozzle apparatus2025
Fluid control device and method for fluid control in an extreme ultraviolet ligh2025
Apparatus for and method of controlling droplet generator performance2025
Target delivery system2025
Target delivery system2023
Apparatus and method for extending target material delivery system lifetime2023
Turbine blade and steam turbine including the same2022
Apparatus for and method of controlling coalescence of droplets in a droplet str2022
Method and device for generating electromagnetic radiation by means of a laser-p2020
Method and device for generating electromagnetic radiation by means of a laser-p2019
Device and method for generating UV or X-ray radiation by means of a plasma2018
Device and method for generating UV or X-ray radiation by means of a plasma2018