Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems, apparatus, and methods for an improved load port

Systems, apparatus, and methods for an improved load port

US Patent 10262884 · Granted Apr 16, 2019

Estimated economic value: $29,421,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Equipment front end modules with induced gas mixing, and methods of use thereof2025
Radio frequency power return path2025
Radio frequency power return path2025
Three layer resonator coil for linear accelerator2025
Seal mechanism for load port doors2025
Linear accelerator assembly including flexible high-voltage connection2025
Processing chamber with annealing mini-environment2025
Baffle implementation for improving bottom purge gas flow uniformity2024
Robot for simultaneous substrate transfer2024
Systems and methods for integrating load locks into a factory interface footprin2024
Shortened load port for factory interface2024
Filter isolation for equipment front end module2024