Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Glass substrate for mask blank, and method for producing the same

Glass substrate for mask blank, and method for producing the same

US Patent 10241392 · Granted Mar 26, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing gallium oxide substrate and polishing slurry for gallium2025
Substrate for use as mask blank, and mask blank2021
Glass substrate for mask blank, mask blank and photomask2020
Mask blank2019
Mask blank2019
Glass substrate for mask blank, mask blank, photomask, and method for manufactur2018
Glass substrate for mask blank, mask blank, photomask, and method for manufactur2018
Glass substrate for mask blank, mask blank, photomask, and method for manufactur2018
Glass substrate for mask blank, mask blank, photomask, and method for manufactur2018
Glass substrate for mask blank, and method for producing the same2017
Multilayer substrate, manufacturing method for multilayer substrate, and quality2014
Reflecting mask blank, method for manufacturing reflective mask blank and method2014