Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599031 | Glass substrate for mask blank, mask blank and photomask | — | 2020-03-24 |
| 10241392 | Glass substrate for mask blank, and method for producing the same | Yusuke Hirabayashi, Naohiro Umeo | 2019-03-26 |
| 10222689 | Mask blank | Yusuke Hirabayashi | 2019-03-05 |
| 10146125 | Glass substrate for mask blank, mask blank, photomask, and method for manufacturing glass substrate for mask blank | Yusuke Hirabayashi, Nobuhiko Ikenoya | 2018-12-04 |
| 10146126 | Glass substrate for mask blank, mask blank, photomask, and method for manufacturing glass substrate for mask blank | Yusuke Hirabayashi, Nobuhiko Ikenoya | 2018-12-04 |
| 8921017 | Multilayer substrate, manufacturing method for multilayer substrate, and quality control method for multilayer substrate | Yoshiaki Ikuta | 2014-12-30 |
| 8916316 | Reflecting mask blank, method for manufacturing reflective mask blank and method for quality control for reflective mask blank | Yoshiaki Ikuta | 2014-12-23 |