Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for processing a semiconductor wafer using non-contact electrical measurements indicative of a least one side-to-side short or leakage, at least one via-chamfer short or leakage, and at least one corner short or leakage, where such measurements are obtained from cells with respective side-to-side short, via-chamfer short, and corner short test areas, using a charged particle-beam inspector with beam deflection to account for motion of the stage

Method for processing a semiconductor wafer using non-contact electrical measurements indicative of a least one side-to-side short or leakage, at least one via-chamfer short or leakage, and at least one corner short or leakage, where such measurements are obtained from cells with respective side-to-side short, via-chamfer short, and corner short test areas, using a charged particle-beam inspector with beam deflection to account for motion of the stage

US Patent 10199294 · Granted Feb 5, 2019

Estimated economic value: $355,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems, devices, and methods for performing a non-contact electrical measuremen2025
Systems, devices, and methods for performing a non-contact electrical measuremen2025
Systems, devices, and methods for performing a non-contact electrical measuremen2025
Systems, devices, and methods for performing a non-contact electrical measuremen2025
Systems, devices, and methods for aligning a particle beam and performing a non-2025
Systems, devices, and methods for aligning a particle beam and performing a non-2025
Systems, devices, and methods for aligning a particle beam and performing a non-2025
Embedded system to characterize BTI degradation effects in MOSFETs2025
Embedded system to characterize BTI degradation effects in MOSFETs2025
Embedded system to characterize BTI degradation effects in MOSFETs2025
Systems, devices, and methods for performing a non-contact electrical measuremen2024
Systems, devices, and methods for performing a non-contact electrical measuremen2024