Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Selectivity in a xenon difluoride etch process

Selectivity in a xenon difluoride etch process

US Patent 10173894 · Granted Jan 8, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing a microstructure2025
Method for detecting defects in thin film layers2023
Vapour etch of silicon dioxide with improved selectivity2019
Selectivity in a xenon difluoride etch process2017
Method of etching a sacrificial silicon oxide layer2014
Method and apparatus for monitoring a microstructure etching process2010
Flexible guides for light energy1991