Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358784 | Method of manufacturing a microstructure | — | 2025-07-15 |
| 11740185 | Method for detecting defects in thin film layers | Daniel Drysdale | 2023-08-29 |
| 10354884 | Vapour etch of silicon dioxide with improved selectivity | — | 2019-07-16 |
| 10173894 | Selectivity in a xenon difluoride etch process | — | 2019-01-08 |
| 9786526 | Selectivity in a xenon difluoride etch process | — | 2017-10-10 |
| 8679354 | Method of etching a sacrificial silicon oxide layer | — | 2014-03-25 |
| 7672750 | Method and apparatus for monitoring a microstructure etching process | Michael Leavy, Graeme Pringle | 2010-03-02 |
| 5031980 | Flexible guides for light energy | Michael John Colles, John N. MacLeod | 1991-07-16 |