Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Radiation beam apparatus

Radiation beam apparatus

US Patent 10168621 · Granted Jan 1, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Manufacturing a reflective diffraction grating2024
Imprint lithography2024
Metrology measurement method and apparatus2024
Radiation system2024
Contaminant detection metrology system, lithographic apparatus, and methods ther2023
Imprint lithography2023
Method and apparatus for determining a radiation beam intensity profile2022
Particle traps and barriers for particle suppression2021
Particle suppression systems and methods2021
Radiation source2021
Beam splitting apparatus2021
Method of measuring a parameter of a lithographic process, metrology apparatus2021