Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

US Patent 10147627 · Granted Dec 4, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Access to one or more levels of material storage shelves by an overhead hoist tr2021
Helium management control system2021
Pressure burst free high capacity cryopump2020
Automated material handling system for semiconductor manufacturing based on a co2019
Automated material handling system for semiconductor manufacturing based on a co2019
Automated material handling system for semiconductor manufacturing based on a co2019
Automated material handling system for semiconductor manufacturing based on a co2018
Automated material handling system for semiconductor manufacturing based on a co2018
Automated material handling system for semiconductor manufacturing based on a co2018
Helium management control system2018
Automated material handling system for semiconductor manufacturing based on a co2018
Automated material handling system for semiconductor manufacturing based on a co2018