Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer temperature control with consideration to beam power input

Wafer temperature control with consideration to beam power input

US Patent 10128084 · Granted Nov 13, 2018

Estimated economic value: $5,379,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Projectile stabilizers, projectiles with stabilizers, and methods of manufacturi2025
Fluid filter assembly with a filter cartridge and housing interface2024
Toxic outgas control post process2024
Projectile stabilizers, projectiles with stabilizers, and methods of manufacturi2023
Method for decreasing cool down time with heated system for semiconductor manufa2023
Substrate support having customizable and replaceable features for enhanced back2021
Wafer soak temperature readback and control via thermocouple embedded end effect2021
In-situ wafer temperature measurement and control2021
Radiant heating presoak2020
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner 2020
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner 2020
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner 2020