Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multichannel thermocouple compensation for three dimensional temperature gradient

Multichannel thermocouple compensation for three dimensional temperature gradient

US Patent 10119867 · Granted Nov 6, 2018

Estimated economic value: $29,398,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Power and data transmission to substrate support in plasma chambers via optical 2024
Inventory, growth, and risk prediction using image processing2020
Virtual metrology method for ESC temperature estimation using thermal control el2019
Crimp collar with nylon insert combination2019
Single barb hose tail2019
Apparatus for generating waves in a swimming pool2019
Substrate processing system printed-circuit control board assembly with one or m2019
Inventory, growth, and risk prediction using image processing2018
Multichannel thermocouple compensation for three dimensional temperature gradien2016
Multichannel thermocouple compensation for three dimensional temperature gradien2016
Multichannel thermocouple compensation for three dimensional temperature gradien2016
Multichannel thermocouple compensation for three dimensional temperature gradien2016