Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus

Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus

US Patent 10109451 · Granted Oct 23, 2018

Estimated economic value: $19,549,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of inspecting a sample, and multi-electron beam inspection system2025
Method for testing a packaging substrate, and apparatus for testing a packaging 2025
Method for testing a packaging substrate, and apparatus for testing a packaging 2025
Method for automated critical dimension measurement on a substrate for display m2023
Clutch assembly for a manual transmission of a motor vehicle2023
Method of automatically focusing a charged particle beam on a surface region of 2023
Access system for a vehicle, method for an access system, computer program produ2022
Method of automatically focusing a charged particle beam on a surface region of 2021
Method for producing a curved tubular connection element2021
Diesel particulate sensor2020
Method of inspecting a sample with a charged particle beam device, and charged p2019
Method of inspecting a sample with a charged particle beam device, and charged p2019