Assignee
- Shin-Etsu Chemical Co.
- National Institute Of Advanced Industrial Science And Technology
- National University Corporation Kagawa University
Inventors
- Hitoshi Noguchi (98 patents)
- Shozo Shirai (14 patents)
- Toshiharu Makino (26 patents)
- Masahiko Ogura (44 patents)
- Hiromitsu Kato (26 patents)
- Hiroyuki Kawashima (46 patents)
- Daisuke Kuwabara (3 patents)
- Satoshi Yamasaki (93 patents)
- Daisuke Takeuchi (42 patents)
- Norio Tokuda (10 patents)
- Takao Inokuma (5 patents)
- Tsubasa Matsumoto (5 patents)